Compliant wafer-level packaging devices and methods of fabrication

ABSTRACT

Devices and method of fabrication thereof are disclosed. A representative device includes one or more lead packages. The lead packages include a substrate including a plurality of die pads, an overcoat polymer layer, a plurality of sacrificial polymer layers disposed between the substrate and the overcoat polymer layer, and a plurality of leads. Each lead is disposed upon the overcoat polymer layer having a first portion disposed upon a die pad. The sacrificial polymer layer can be removed to form one or more air-gaps.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to copending U.S. provisionalapplication entitled, “The Utilization of Air Gaps and MechanicalDecoupling for In Plane Ultra High x-y-z Compliant Leads”, having Ser.No. 60/249,897, filed Nov. 18, 2000, which is entirely incorporatedherein by reference.

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

The U.S. government has a paid-up license in this invention and theright in limited circumstances to require the patent owner to licenseothers on reasonable terms as provided for by the terms ofMDA972-99-1-0002 awarded by the DARPA.

TECHNICAL FIELD

The present invention is generally related to integrated circuits and,more particularly, is related to compliant wafer-level packaging devicesand methods of fabrication thereof.

BACKGROUND OF THE INVENTION

Conventional chip manufacturing is divided into front-end, back-end, andtail-end processing. Front-end processing refers to the fabrication ofCMOS transistors, while back-end processing describes wafermetallization. Tail-end processing refers here to the packaging of theindividual dies. Generally, the final wafer-level process step is thefabrication of the die pads, which serve as the interface between thedie and the package. Each individual die, while still part of the wafer,is then functionally tested to identify known good die (KGD) followed bywafer singulation. The KGD's are then shipped to a packaging foundrywhere they are individually temporary package for burn-in. The dies thatpass this test are then individually packaged into their final packageand tested again for functionality. This final step concludes tail-endprocessing and the functional packaged dies are finally ready for systemassembly.

The mechanical performance of a package is important for wafer-leveltesting, protection, and reliability. Wafer-level testing requiressimultaneous reliable contact to all die across a non-planar wafersurface. In-plane (i.e. x-y axis) compliance is generally required toaccount for potential problems such as, for example, thermal expansionbetween the chip and printed wiring board and probe contact with leads.Wafer-level testing and burn-in demands significant out-of-plane (i.e.,z-axis) compliance in order to establish reliable electrical contractbetween the pads on the non-planer wafer and pads/probes on the boardsurfaces. Non-compliance of the input/output (I/O) interconnects/padsout-of-plane, as well as in-plane (i.e., x-y axis), can causewafer-level testing problems.

Unlike conventional packaging, wafer-level packaging (WLP) is acontinuation of integrated circuit manufacturing. In WLP, additionalmasking steps can be used after fabricating die pads to simultaneouslypackage all dice across the wafer. A unique class of WLP is calledcompliant wafer-level packaging (CWLP). In CWLP, additional maskingsteps can be used after fabricating die pads to batch fabricatecompliant x-y-z axis I/O leads between the die pads and the board pads.A mechanically x-y-z flexible lead is formed between the die pad and thebump interconnection that would be joined with the board. Accordingly,there is a need in the industry for x-y-z compliant leads that providehigh density, high electrical performance, low cost, and ability ofbatch fabrication. Thus, a heretofore unaddressed need exists in theindustry to address the aforementioned deficiencies and inadequacies.

SUMMARY OF THE INVENTION

A representative device of the present invention includes one or morelead packages. The lead packages include a substrate including aplurality of die pads, an overcoat polymer layer, a plurality ofsacrificial polymer layers disposed between the substrate and theovercoat polymer layer, and a plurality of leads. Each lead is disposedupon the overcoat polymer layer having a first portion disposed upon adie pad. The sacrificial polymer layer can be removed to form one ormore air-gaps.

The present invention also involves method for fabricating the devicedescribed above. A representative method includes: (a) providing asubstrate having at least one die pad disposed upon the surface of thesubstrate; (b) disposing and patterning a first sacrificial polymerlayer onto at least one portion of the substrate; (c) disposing anovercoat polymer layer onto the substrate, at least one die pad, and thefirst sacrificial polymer layer; (d) removing portions of the overcoatpolymer layer to expose at least one die pad; (e) disposing a first leadlayer onto the at least one die pad and portions of the overcoat polymerlayer; and (f) removing the sacrificial layer to define a first air-gapwithin the overcoat polymer layer.

Other systems, methods, features, and advantages of the presentinvention will be or become apparent to one with skill in the art uponexamination of the following drawings and detailed description. It isintended that all such additional systems, methods, features, andadvantages be included within this description, be within the scope ofthe present invention, and be protected by the accompanying claims.

BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the invention can be better understood with reference tothe following drawings. The components in the drawings are notnecessarily to scale, emphasis instead being placed upon clearlyillustrating the principles of the present invention. Moreover, in thedrawings. like reference numerals designate corresponding partsthroughout the several views.

FIG. 1A is a sectional view illustrating a representative embodiment ofthe compliant wafer device of the present invention.

FIG. 1B is a top view illustrating the representative embodiment of thecompliant wafer device shown in FIG. 1A.

FIGS. 2A-2G are sectional views that illustrate a representative processof fabricating the compliant wafer device shown in FIGS. 1A and 1B.

FIGS. 3A-3G are sectional views that illustrate another representativeprocess of fabricating the compliant wafer device shown in FIGS. 1A and1B.

FIG. 4 is a sectional view that illustrates another embodiment of thecompliant wafer device.

FIGS. 5A-5H are sectional views that illustrate a representative processof fabricating another embodiment of the compliant wafer device shown inFIG. 4.

FIG. 6 is a sectional view that illustrates another embodiment of thecompliant wafer device.

FIGS. 7A-7I are sectional views that illustrate a representative processof fabricating another embodiment of the compliant wafer device as shownin FIG. 6.

FIG. 8 is a sectional view that illustrates many lead packages.

FIG. 9 is a section view that illustrates lead packages of multiplesizes.

FIG. 10 is a section view that illustrates lead packages of multiplesizes.

DETAILED DESCRIPTION

The complaint wafer devices of the present invention exhibit exceptionalelectrical performance, with resistance, inductance, and capacitance.Consequently, the compliant wafer device may preserve signal integrity,and minimizes ground bounce, cross talk, resistive loses, and heatgeneration. The compliant wafer device includes one or more leadpackages. The methods of fabricating lead packages incorporates air-gapsin the overcoat polymer layer to enhance lead compliance in-plane andout-of-plane (i.e. x-y axis and z axis directions). The compliant leadaccounts for mismatch in the coefficient of thermal expansion betweenthe chip and the board and allows the interconnection of chips to boardsto expand and/or contact without underfill. In addition, wafer-levelfunctionality testing as well as wafer-level bum-in to identify knowngood packaged die (KGPD) can be enhanced.

Reference will now be made to the figures; FIG. 1A illustrates asectional view of a representative embodiment of compliant wafer device10. Compliant wafer device 10 includes one or more lead packages 11. Thelead package includes a substrate 12, a die pad 14, an overcoat polymerlayer 16, an air-gap 18, and a lead 20. The die pad 14 is disposed uponthe substrate 12. The overcoat polymer layer 16 is also disposed uponthe substrate 12. The air-gap 18 occupies a space bounded by thesubstrate 12 and the overcoat polymer layer 16. The lead 20 is disposedupon the overcoat polymer layer 16 and die pad 14. A portion of the leadis disposed upon the overcoat polymer layer 16 above the air-gap 18.FIG. 1B is a top-view of compliant wafer device 10 illustrated in FIG.1A. FIG. 1B illustrates that a portion of the lead 20 is disposed abovethe air-gap 18. The lead geometry is not limited to that shown in FIG.1B. Instead, various lead geometries can provide compliance, consistentwith the scope of the present invention. Additional steps can beperformed to fabricate an attachment or contact on the end portion ofthe lead, which is disposed above the air-gap. This contact can includea variety of items designed to make a contact or attachment to a pad orpoint on another substrate. These attachments can be, for example, asolder bump, a conductive adhesive or filled polymer, or a contactprobe. These can be formed with methods such as electroplating,electroless plating, screen or stencil printing.

The substrate 12 can be any of a variety of substrates that can be usedto support the compliant wafer device. The substrate 12 includessilicon, silicon compounds, germanium, germanium compounds, gallium,gallium compounds, indium, indium compounds, or other semiconductormaterials/compounds. Non-semiconductor substrate materials includeceramics and organic boards.

The die pads 14 can be deposited upon the surface of the substrate 12using techniques such as, for example, sputtering, evaporation,electron-beam systems, electroplating, electro-less plating, anddisplacement reactions.

The overcoat polymer layer 16 can be any modular polymer that includesthe characteristic of being permeable or semi-permeable to thedecomposition gases produced by the decomposition of a sacrificialpolymer while forming the air-gap 18. In addition, the overcoat polymerlayer 16 has elastic properties so as to not rupture or collapse underfabrication and use conditions. Further, the overcoat polymer layer 16is stable in the temperature range in which the sacrificial polymerdecomposes. Furthermore, the overcoat polymer layer 16 enables the lead20 to be compliant in-plane (i.e., the x-y axis direction) when the leadis adhered to the polymer surface. The lead may be non-adherent to thepolymer surface by selecting metal and polymer combinations that areknown to form poor adhesion. In addition, the leads can be fabricated ona sacrificial layer, such as a metal or organic material. Examples ofthe overcoat polymer layer 16 include compounds such as, for example,polyimides, polynorbornenes, epoxides, polyarylenes ethers, andparylenes. More specifically the overcoat polymer layer 16 includescompounds such as Amoco Ultradel™ 7501, BF Goodrich Avatrel™ DielectricPolymer, DuPont 2611, DuPont 2734, DuPont 2771, and DuPont 2555. Theovercoat polymer layer 16 can be deposited onto the substrate 12 usingtechniques such as, for example, spin coating, doctor-blading,sputtering, lamination, screen or stencil-printing, chemical vapordeposition (CVD), plasma based deposition systems.

The air-gap 18 is formed by the removal (e.g. decomposition) of asacrificial layer from the area in which the air-gap 18 is located asillustrated in FIGS. 1A and 1B. During the fabrication process of thecompliant wafer device 10, a sacrificial layer 18 is deposited onto thesubstrate 12 and patterned. Thereafter, the overcoat polymer layer 18 isdeposited around the sacrificial polymer. Subsequently, the sacrificialpolymer is removed forming the air-gap 18. The air-gap 18 enables thelead 20 to be compliant out-of-plane (z axis). The processes fordepositing and removing the sacrificial polymer are discussed in moredetail hereinafter. The air-gap 18 height can range from about 0.5 toabout 300 micrometers and more particularly can range from about 5 toabout 50 micrometers. The air-gap 18 radius can range from about 1 toabout 300 micrometers and more particularly can range from about 50 toabout 250 micrometers.

The sacrificial polymer can be virtually any polymer that slowlydecomposes so as to not create too great of a pressure while forming theair-gap 18. In addition, the decomposition of the sacrificial polymerproduces gas molecules small enough to permeate the overcoat polymerlayer 16. Further, the sacrificial polymer has a decompositiontemperature less than the decomposition or degradation temperature ofthe overcoat polymer layer 16. Examples of the sacrificial polymerinclude compounds such as polynorbornenes, polycarbonates, polyethers,and polyesters. More specifically the sacrificial polymer includescompounds such as BF Goodrich Unity™ 400, polypropylene carbonate,polyethylene carbonate, and polynorborene carbonate. The sacrificialmaterial may also contain photosensitive compounds which are additivesfor patterning or decomposition.

The sacrificial polymer layer 16 can be deposited onto the substrateusing techniques such as, for example, spin coating, doctor-blading,sputtering, lamination, screen or stencil-printing, melt dispensing,chemical vapor deposition (CVD), and plasma based deposition systems.

The height of the sacrificial polymer can range from about 0.5 to about300 micrometers and preferable in the range of about 5 to about 50micrometers. The radius of the sacrificial polymer can range from about1 to about 300 micrometers and more particularly can range from about 50to about 250 micrometers. In general, the thickness of the sacrificialpolymer (i.e. ultimately the height of the air-gap) is controlled byboth the weight fraction of the sacrificial polymer in solution as wellas the deposition technique.

The sacrificial polymer can be removed by thermal decomposition, ultraviolet irradiation, etc., or patterned directly during application, i.e.screen-printing. The thermal decomposition of the sacrificial polymercan be performed by heating the compliant wafer device 10 to thedecomposition temperature of the sacrificial polymer and holding at thattemperature for a certain time period (e.g. 1-2 hours). Thereafter, thedecomposition products diffuse through the overcoat polymer layer 18leaving a virtually residue-free hollow structure (air-gap).

The lead 20 can be fabricated of any single layer or layers of differentmetals, metal composites, dielectrics, superconductors, organicconductors, or light emitting organic materials appropriate for thecompliant wafer device 10. The metals and metal composites include gold,gold alloys, copper, and copper alloys. The lead 20 can be fabricated bymonolithically electroplating the selected metal or metal composite ontothe compliant wafer device. The lead 20 can range from about 1 to about100 micrometers in thickness and preferably from about 4 to about 40micrometers. The preferred embodiment has a thickness of about 15micrometers The lead 20 lengths can range from about 2 and about 400micrometers and preferably from about 40 to about 120 micrometers. Thelead 20 width can range from about 1 to about 100 micrometers andpreferable from about 2 to about 40 micrometers. The preferredembodiment has a width in the range of about 15 to about 25 micrometers.

The lead 20 can be compliant in-plane and out-of-plane. The shape of thelead along with the overcoat polymer layer 16 provides compliancein-plane, while the air-gap 16 provides compliance out-of-plane. Thelead 20 is compliant in-plane in the range of about 1 to about 100micrometer and preferable from about 1 to about 50 micrometers. Inaddition, the lead 20 is compliant out-of-plane in the range of about 1to about 100 micrometer and preferable from about 1 to about 50micrometers.

For the purposes of illustration only, and without limitation,embodiments of the present invention will be described with particularreference to the below-described fabrication methods. Note that notevery step in the process is described with reference to the processdescribed in the figures hereinafter. For example, photolithography orsimilar techniques can be used to define the overcoat polymer layer 16,sacrificial polymer (air-gap 18), and/or lead pattern. In this regard,the pattern can be defined by depositing material onto the surface ofthe substrate 12 using techniques such as, for example, sputtering,chemical vapor deposition (CVD), plasma based deposition systems,evaporation, electron-beam systems. Furthermore, the pattern can then beremoved using reactive ion etching techniques (RIE), for example.Therefore, the following fabrication processes is not intended to be anexhaustive list that includes every step required to fabricate theembodiments of the compliant wafer devices.

FIGS. 2A-2G are sectional views that illustrate a representative processfor fabricating the lead package 11 for the compliant wafer device 10illustrated in FIGS. 1A and 1B. FIG. 2A illustrates a substrate 12, andFIG. 2B illustrates the substrate 12 having a die pad 14 disposed uponthe substrate 12. FIG. 2C illustrates a sacrificial polymer 22 disposedupon the substrate 12. The sacrificial polymer 22 is disposed in thespace that the air-gap 18 is subsequently formed. FIG. 2D illustratesthe addition of the overcoat polymer layer 16 disposed over the die pad14 and sacrificial polymer 22. FIG. 2E illustrates via 24 etched intothe overcoat polymer layer 16 to expose the die pad 14. The via 24 canbe etched using techniques such as, for example, RIE, photo-definition,and laser drilling. FIG. 2F illustrates the lead 20 disposed upon theovercoat polymer layer 16 and the die-pad 14. A portion of the lead isdisposed above the overcoat polymer portion, which is above thesacrificial polymer 22. FIG. 2G illustrates compliant wafer device 10after the sacrificial polymer 22 has been removed and consequentlyforming air-gap 18. As indicated above, the air-gap 18 enhancescompliance of lead 20 out-of-plane.

FIGS. 3A-3G are sectional views that illustrate an alternative processfor fabricating the lead package 11 for the compliant wafer device 10.Similar to FIGS. 2A-2C, FIGS. 3A-3C illustrate a process where the diepad 14 and sacrificial polymer 22 have been disposed upon the substrate12. Thereafter, the overcoat polymer layer 16 is disposed upon the diepad 14, sacrificial polymer 22, and substrate 12. Unlike the processillustrated in FIGS. 2A-2G, the sacrificial polymer 22 is removed priorto the addition of lead 20, as shown in FIG. 2E. Removal of thesacrificial polymer 22 forms air-gap 18. FIG. 2F illustrates that via 24is etched into the overcoat polymer layer 16 to expose die pad 12. FIG.2G illustrates lead 20 disposed upon a portion of the overcoat polymerlayer 16 and the die pad 14. The processes for fabricating compliantwafer device 10 illustrated in FIGS. 2A-2G and 3A-3G are different inthat the sacrificial layer 22 is removed at different steps.

FIG. 4 is a sectional view that illustrates another embodiment of thecompliant wafer device 25 exhibiting a second air-gap 27. Compliantwafer device 25 illustrated in FIG. 4 is similar to the compliant waferdevice 10 except that lead 20 in compliant wafer device 25 exhibitssecond air-gap 27 between lead 20 and the overcoat polymer layer 16. Thesecond air-gap 27 provides lead 20 additional compliance out-of-plane.

FIGS. 5A-5F are sectional views that illustrate a representative processfor fabricating the lead package 26 for the compliant wafer device 25illustrated in FIG. 4. Similar to FIGS. 2A-2E, FIGS. 5A-5E illustrate aprocess where the overcoat polymer layer 16 is disposed upon the die pad14, (first) sacrificial polymer 22, and the substrate 12. In addition,via 24 has been etched into the overcoat polymer layer 16 exposing thedie pad 14. FIG. 5F illustrates the addition of a second sacrificialpolymer 28 disposed upon a portion of the overcoat polymer layer 16. Thesecond sacrificial polymer 28 is disposed upon the portion of theovercoat polymer layer 16 that lead 20 is subsequently going to bedisposed upon. FIG. 5G illustrates lead 20 disposed upon the die pad 14,the overcoat polymer layer 16, and the second sacrificial polymer 28.FIG. 5F illustrates the compliant wafer device 25 after the firstsacrificial polymer 22 and the second sacrificial polymer 28 have beenremoved. Removal of the first sacrificial polymer 22 creates air-gap 18,while removal of the second sacrificial polymer 28 creates secondair-gap 27. The second air-gap can also be fabricated by choosing a seedlayer different from the metal lead then selectively etching this metalseed layer from underneath the lead.

FIG. 6 is a sectional view of another embodiment of compliant waferdevice 30. Compliant wafer device 30 is similar to compliant waferdevice 10 except that lead 32 exhibits a stress gradient. The stressgradient is created by forming lead 32 with two layers. The stressgradient between the two layers of the lead 32 causes the lead 32 toincline in the z-axis direction away from the overcoat polymer layer 16.The incline creates a third air-gap 33 between lead 32 and the overcoatpolymer layer 16. The third air-gap 33 enhances the compliance of lead32 out-of-plane.

FIGS. 7A-7I are sectional views that illustrate the process forfabricating the lead package 31 (FIG. 6) for the compliant wafer device30. Similar to FIGS. 2A-2E, FIGS. 7A-7E illustrate a process where theovercoat polymer layer 16 is disposed upon the die pad 14, sacrificialpolymer 22, and the substrate 12. In addition, via 24 has been etchedinto the overcoat polymer layer 16 exposing the die pad 14. FIG. 7Fillustrates the first lead layer 34 disposed upon a portion of theovercoat polymer layer 16. FIG. 7G illustrates the second lead layer 36disposed upon the first lead layer 34 thereby forming the lead layer 32.FIG. 7H illustrates the incline of the lead 32 caused by the stressgradient between the first and second lead layers 34 and 36. FIG. 7Iillustrates air-gap 18 formed by the removal of the sacrificial polymer22.

Each of the processes illustrated in FIGS. 2A-2G, 3A-3G, 5A-5F,and 7A-7Imay be performed in a different sequence. In addition, the removal ofsacrificial polymer 22 and the second sacrificial polymer 28 can beperformed as different process stages, like those illustrated in FIGS.2A-2G and 3A-3G. Further, a second sacrificial polymer 28 can be used inthe process to form compliant wafer device 30 in FIG. 6. Therefore,these and other variations known to one skilled in the art of thefabrication processes described are included herein.

FIGS. 1-7 illustrated compliant wafer devices having only one leadpackage, which was done to clearly describe the compliant wafer devicesand the fabrications processes. However, many lead packages can bedisposed upon a compliant wafer device. FIG. 8 is a sectional view thatillustrates that many lead packages can be fabricated upon a compliantwafer device 40. The number of leads can range from about 10 to about100,000 leads per centimeter squared (cm²) and preferable from about1,000 to about 30,000 leads per cm². The number of leads in thepreferred embodiment can range from about 10,000 to about 15,000 leadsper cm².

FIG. 9 is a sectional view that illustrates that lead packages 52, 54,and 56 of multiple sizes can be fabricated upon a compliant wafer device50. In addition, FIG. 9 illustrates that lead packages 54 and 53 withand without air-gaps can be fabricated upon the same compliant waferdevice 50.

FIG. 10 is a sectional view that illustrates that the lead packages 62and 64 can be oriented to maximize the density and in-plane complianceof leads upon the compliant wafer device 60. FIG. 10 illustrates thatlead packages 62 and 64 of multiple sizes can be fabricated upon thesame compliant wafer device 60.

The fabrication processes illustrated in FIGS. 2-7 are very low costwafer packaging processes. These processes use parallel processing inwhich all dies on a compliant wafer device are packaged and testedsimultaneously. By contrast, conventional packaging is a serial processin which a wafer is sawed up and the individual dice are individuallypackaged and tested. As a result, these processes offer substantial timeand cost savings.

The electrical performance of the compliant wafer devices 10, 25, and 30is good in the direct current to microwave frequencies. Due to the shortlead 20 and 32 length, the inductance, resistance, and capacitance isminimal. As a result, the package leads 11, 26, and 31 can preservesignal integrity and minimize ground bounce, cross talk, and resistivelosses, and heat generation. Some of the benefits to of the compliantwafer devices 10, 25, 30, 40, 50, and 60 having ultra high I/O densityinclude enhancement of chip's power wiring distribution, increase ininput/output bandwidth, satisfy 3D structure I/O demands, suppression ofsimultaneous switching noise, and improve isolation in a mixed signalsystems as well as enhancing chip testing due to ability to gain accessto a greater number of internal chip nodes/cells. In addition, thecompliant wafer devices 10, 25, 30, 40, 50, and 60 can be attached to aboard with much higher coefficient of thermal expansion withoutunderfill because the leads 20 and 31 are flexible in-plane andout-of-plane. Additionally, not only does this reduce the cost ofassembly, but it also enhances reliability. This compliant package canbe integrated with optical and RF interconnects as well as micro-electromechanical devices. Furthermore, the simplification of the chip testingprocedure substantially reduces testing time and cost.

It should be emphasized that the above-described embodiments of thepresent invention, particularly, any “preferred” embodiments, are merelypossible examples of implementations, merely set forth for a clearunderstanding of the principles of the invention. For example, theovercoat polymer layer can be replaced with other overcoat materialsthat have the same or similar characteristics as the overcoat polymerlayer. The other overcoat materials can include overcoat organic andnon-organic overcoat materials. Another example includes having multipleair-gaps or stacked air-gaps within the overcoat polymer layer. Thestacked air-gaps could be fabricated by forming alternating sacrificialpolymer layers and overcoat polymer layers. One skilled in the art couldprovide various types of configurations for forming the air-gaps andthese configurations are intended to be included within the scope ofthis disclosure.

Therefore, many variations and modifications may be made to theabove-described embodiment(s) of the invention without departingsubstantially from the spirit and principles of the invention. All suchmodifications and variations are intended to be included herein withinthe scope of this disclosure and the present invention and protected bythe following claims.

Therefore, having thus described the invention, the following isclaimed:
 1. A device comprising: a substrate including a plurality ofdie pads, an overcoat polymer layer, a plurality of sacrificial polymerlayers disposed between the substrate and the overcoat polymer layer,and a plurality of leads, each lead disposed upon the overcoat polymerlayer having a first portion disposed upon a die pad, wherein thesacrificial polymer layer can be removed to form a plurality ofair-gaps, and wherein the sacrificial polymer layer is a polyimide. 2.The device of claim 1, wherein the sacrificial layer height is about 5micrometer to about 50 micrometers and the radius is about 50 micrometerto about 250 micrometers.
 3. The device of claim 1, wherein the overcoatpolymer layer is polynorborene carbonate.
 4. The device of claim 1,wherein the compounds include photosensitive compound additives.
 5. Thedevice of claim 1, wherein the lead has a stress gradient which causesan upper portion of the lead to incline so that a space is formedbetween the lead and the overcoat polymer layer.
 6. The device of claim1, wherein there is a second sacrificial polymer layer disposed betweenan upper portion of the lead and the overcoat polymer layer, wherein thesecond polymer can be removed to form a second air-gap between the leadand the overcoat polymer layer.
 7. The device of claim 1, wherein theovercoat polymer layer includes compounds selected from polyimides,epoxides, polynorbornenes, polyarylene ethers, and parylenes.
 8. Adevice comprising: a substrate including a plurality of die pads, anovercoat polymer layer, a plurality of sacrificial polymer layersdisposed between the substrate and the overcoat polymer layer, and aplurality of leads, each lead disposed upon the overcoat polymer layerhaving a first portion disposed upon a die pad, wherein the sacrificialpolymer layer can be removed to form a plurality of air-gaps.
 9. Thedevice of claim 8, wherein there is a second sacrificial polymer layerdisposed between an upper portion of the lead and the overcoat polymerlayer, wherein the second polymer layer can be removed to form a secondair-gap between the lead and the overcoat polymer layer.
 10. The deviceof claim 8, wherein the overcoat polymer layer includes compoundsselected from polyimides, epoxides, polynorbornenes, polyarylene ethers,and parylenes.
 11. The device of claim 8, wherein the sacrificialpolymer includes compounds selected from polynorbornenes,polycarbonates, polyethers, and polyesters.
 12. The device of claim 11,wherein the compounds include photosensitive compound additives.
 13. Thedevice of claim 8, wherein the lead has a stress gradient which causesan upper portion of the lead to incline so that a space is formedbetween the lead and the overcoat polymer layer.
 14. A devicecomprising: a lead package, wherein the lead package includes a die pad,an overcoat polymer layer, a sacrificial polymer layer disposed betweena substrate and the overcoat polymer layer, and a lead, the leaddisposed upon the overcoat polymer layer having a first portion disposedupon the die pad, wherein the sacrificial polymer layer can be removedto form an air-gap.
 15. The device of claim 14, including about 10 leadpackages to about 100,000 lead packages per centimeter squared.
 16. Thedevice of claim 14, including about 10,000 lead packages to about 20,000lead packages per centimeter squared.
 17. The device of claim 14,wherein the air-gap height is about 0.5 micrometer to about 300micrometers and the radius is about 1 micrometer to about 300micrometers.
 18. The device of claim 14, wherein the sacrificial layerheight is about 0.5 micrometer to about 3000 micrometers and the radiusis about 1 micrometer to about 300 micrometers.
 19. The device of claim14, wherein the sacrificial polymer includes compounds selected frompolynorbornenes, polycarbonates, polyethers, and polyesters.
 20. Thedevice of claim 14, wherein the overcoat polymer layer includescompounds selected from polyimides, epoxides, polynorbornenes,polyarylene ethers, and parylenes.
 21. A method for fabricating awafer-level device comprising: (a) providing a substrate having at leastone die pad disposed upon a surface of the substrate; (b) disposing afirst sacrificial polymer layer onto at least one portion of thesubstrate; (c) disposing an overcoat polymer layer onto the substrate,at least one die pad, and the first sacrificial polymer layer; (d)removing portions of the overcoat polymer layer to expose at least onedie pad; (e) disposing a first lead layer onto the at least one die padand portions of the overcoat polymer layer; and (f) removing thesacrificial layer to define a first air-gap within the overcoat polymerlayer.
 22. The method of claim 21, further including: disposing a secondsacrificial layer onto portions of the overcoat polymer layer after (c)and before (d).
 23. The method of claim 22, wherein (f) furtherincludes: removing the second sacrificial layer to define a secondair-gap between the lead and overcoat polymer layer.
 24. The method ofclaim 21, wherein (e) includes disposing a second lead layer onto thefirst lead layer forming a third lead that has a stress gradient whichcauses an upper portion of said third lead to incline so that a thirdair-gap is formed between the third lead and the overcoat polymer layer.25. A method for fabricating a wafer-level device comprising: (a)providing a substrate having at least one die pad disposed upon asurface of the substrate; (b) disposing a sacrificial polymer layer ontoat least one portion of the substrate; (c) disposing an overcoat polymerlayer onto the substrate, at least one die pad, and the sacrificialpolymer layer; (d) removing portions of the overcoat polymer layer toexpose at least one die pad; (f) removing the sacrificial layer todefine a first air-gap within the overcoat polymer layer; and (e)disposing a first lead layer onto the at least one die pad and portionsof the overcoat polymer layer.
 26. The method of claim 25, wherein thesacrificial polymer layer is selected from polynorbornenes,polycarbonates, polyethers, and polyesters.
 27. The method of claim 25,wherein the compounds include photosensitive compound additives.
 28. Themethod of claim 25, wherein the overcoat polymer layer is selected frompolyimides, polynorbornenes, epoxides, polyarylene ethers, andparylenes.
 29. The method of claim 25, wherein the sacrificial polymerlayer height is about 5 micrometers to about 50 micrometers and theradius is about 50 micrometers to about 300 micrometers.
 30. A methodfor fabricating a compliant wafer device having a plurality of leadpackages, comprising: (a) providing a substrate having a plurality ofdie pads disposed upon the surface of the substrate; (b) disposing afirst sacrificial polymer layer onto at least one portion of thesubstrate; (c) disposing an overcoat polymer layer onto the substrate,the plurality of die pads, and the first sacrificial polymer layer; (d)removing portions of the overcoat polymer layer to expose the pluralityof die pads; and (e) disposing a first lead layer onto the plurality ofdie pads and portions of the overcoat polymer layer; and (f) removingthe sacrificial layer to define a plurality of first air-gaps within theovercoat polymer layer.
 31. The method of claim 30, wherein thecompliant wafer device includes about 10 lead packages to about 100,000lead packages per centimeter squared.
 32. A method for fabricating acompliant wafer device having a plurality of lead packages, comprising:(a) providing a substrate having a plurality of die pads disposed uponthe surface of the substrate; (b) disposing a first sacrificial polymerlayer onto at least one portion of the substrate; (c) disposing anovercoat polymer layer onto the substrate, the plurality of die pads,and the first sacrificial polymer layer; (d) removing portions of theovercoat polymer layer to expose the plurality of die pads; (e) removingthe sacrificial layer to define a plurality of first air-gaps within theovercoat polymer layer; and (f) disposing a first lead layer onto theplurality of die pads and portions of the overcoat polymer layer. 33.The method of claim 32, wherein the compliant wafer device includesabout 10 lead packages to about 100,000 lead packages per centimetersquared.
 34. A device comprising: a substrate including an overcoatpolymer layer and a plurality of sacrificial polymer layers disposedbetween the substrate and the overcoat polymer layer, wherein theovercoat polymer layer is polynorborene carbonate.
 35. The device ofclaim 34, wherein the sacrificial layer height is about 5 micrometer toabout 50 micrometers and the radius is about 50 micrometer to about 250micrometers.
 36. The device of claim 34, wherein the sacrificial layercomprises a polyimide.
 37. The device of claim 34, wherein thesacrificial polymer includes compounds selected from polynorbornenes,polycarbonates, polyethers, and polyesters.
 38. The device of claim 37,wherein the compounds include photosensitive compound additives.
 39. Thedevice of claim 34, wherein the lead has a stress gradient which causesan upper portion of the lead to incline so that a space is formedbetween the lead and the overcoat polymer layer.
 40. A devicecomprising: a plurality of lead packages having a substrate, whereineach lead package includes an overcoat polymer layer and a sacrificialpolymer layer disposed between the substrate and the overcoat polymerlayer, wherein the overcoat polymer layer is polynorborene carbonate.41. The device of claim 40, wherein the plurality of lead packagescomprises about 10 lead packages to about 100,000 lead packages percentimeter squared of the device.
 42. The device of claim 40, whereinthe plurality of lead packages comprises about 10,000 lead packages toabout 20,000 lead packages per centimeter squared of the device.
 43. Thedevice of claim 40, wherein the sacrificial layer comprises a polyimide.44. The device of claim 40, wherein the overcoat polymer layer includescompounds selected from polyimides, epoxides, polynorbornenes,polyarylene ethers, and parylenes.
 45. The device of claim 40, whereinthe sacrificial polymer includes compounds selected frompolynorbornenes, polycarbonates, polyethers, and polyesters.
 46. Amethod for fabricating a compliant wafer device, comprising: providing asubstrate having a plurality of die pads disposed upon the surface ofthe substrate; disposing a first sacrificial polymer layer onto at leastone portion of the substrate; disposing an overcoat polymer layer ontothe substrate, the plurality of die pads, and the first sacrificialpolymer layer; removing portions of the overcoat polymer layer to exposethe plurality of die pads; and disposing a first lead layer onto theplurality of die pads and portions of the overcoat polymer layer;removing the sacrificial layer to define a plurality of first air-gapswithin the overcoat polymer layer; and forming a plurality of leadpackages.
 47. The method of claim 46, wherein forming a plurality oflead packages includes forming about 10 lead packages to about 100,000lead packages per centimeter squared of the substrate.
 48. The method ofclaim 46, wherein forming a plurality of lead packages includes formingabout 10,000 lead packages to about 20,000 lead packages per centimetersquared of the substrate.
 49. A device comprising: a substrate includingan overcoat polymer layer and a plurality of sacrificial polymer layersdisposed between the substrate and the overcoat polymer layer, wherein alead has a stress gradient which causes an upper portion of the lead toincline so that a space is formed between the lead and the overcoatpolymer layer.
 50. The device of claim 49, wherein the sacrificial layerheight is about 5 micrometer to about 50 micrometers and the radius isabout 50 micrometer to about 250 micrometers.
 51. The device of claim49, wherein the sacrificial layer comprises a polyimide.
 52. The deviceof claim 49, wherein the overcoat polymer layer includes compoundsselected from polyimides, epoxides, polynorbornenes, polyarylene ethers,and parylenes.
 53. The device of claim 49, wherein the sacrificialpolymer includes compounds selected from polynorbornenes,polycarbonates, polyethers, and polyesters.
 54. The device of claim 53,wherein the compounds include photosensitive compound additives.